08/30185924 DC : 0
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Hardcopy , PDF
31-08-2009
English
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Principle
5 Apparatus
5.1 Scanning electron microscope (SEM)
5.2 Optical microscope
6 Sample preparation
6.1 Cross-section preparation
6.2 Surface roughness
6.3 Taper of cross-section
6.4 Specimen tilt
6.5 Coating damage
6.6 Rounding of edges of the coating
6.7 Overplating
6.8 Etching
6.9 Smearing
7 Calibration of instruments
7.1 Procedure
7.2 Photography
7.3 Measurement
7.4 Calculation of magnification
7.5 Poor contrast
7.6 Magnification
7.7 Uniformity of magnification
7.8 Stability of magnification
8 Test procedure
8.1 General
8.2 Preparation of images
8.3 Measurement
8.4 Thickness calculation
8.5 Correction procedures
9 Measurement uncertainty
10 Expression of results
11 Report
Annex A (informative) - General guidance on the preparation
and measurement of cross-sections
A.1 Introduction
A.2 Cutting
A.3 Mounting
A.4 Grinding and polishing
A.5 Use of the scanning electron microscope
Bibliography
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