13/30266232 DC : 0
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Hardcopy , PDF
31-07-2015
English
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Relating interferometric measurements to surface
form deviation or transmitted wavefront deformation
5 Representation of the measured wavefront deviation
as Zernike coefficients
6 Tolerancing of the slope deviation
Annex A (normative) - Visual interferogram analysis
Annex B (normative) - Zernike polynomials
Bibliography
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