16/30280732 DC : 0
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
BS EN ISO 14644-13 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 13: CLEANING OF SURFACES TO ACHIEVE DEFINED LEVELS OF CLEANLINESS IN TERMS OF PARTICLE AND CHEMICAL CLASSIFICATIONS
Hardcopy , PDF
30-09-2017
English
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 General methodology
5 Object description
6 Cleanliness specifications
7 Determination of initial contamination level
8 Other requirements
9 Selection of a cleaning methodology
10 Material compatibility check
11 Cleaning validation
12 Measurement methods
Annex A (informative) - Aspects of cleaning
Annex B (informative) - Cleaning methods
Annex C (informative) - Material compatibility
with cleaning agents
Annex D (informative) - Cleanliness measurement
Bibliography
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