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Status of Standard is Unknown
BS EN 63068-1 - SEMICONDUCTOR DEVICES - NON-DESTRUCTIVE RECOGNITION CRITERIA OF DEFECTS IN SILICON CARBIDE HOMOEPITAXIAL WAFER FOR POWER DEVICES - PART 1: CLASSIFICATION OF DEFECTS
Available format(s)
Hardcopy , PDF
Language(s)
English
Publisher
FOREWORD
INTRODUCTION
1 Scope
2 Normative references
3 Terms and definitions
4 Classification of defects
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