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Status of Standard is Unknown
BS EN 62047-33 ED.1.0 - SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 33: MEMS PIEZORESISTIVE PRESSURE-SENSITIVE DEVICE
Available format(s)
Hardcopy , PDF
Language(s)
English
Publisher
FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Essential ratings and characteristics
5 Test methods
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