Standard Guide for Measuring Widths of Interfaces in Sputter Depth Profiling Using SIMS

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

01-11-2019

Publisher

American Society for Testing and Materials

1.1This guide provides the SIMS analyst with a method for determining the width of interfaces from SIMS sputtering data obtained from analyses of layered specimens (both organic and inorganic). This guide does not apply to data obtained from analyses of specimens with thin markers or specimens without interfaces such as ion-implanted specimens.

1.2This guide does not describe methods for the optimization of interface width or the optimization of depth resolution.

1.3This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.

1.4This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

Committee	E 42
DocumentType	Guide
Pages	3
PublisherName	American Society for Testing and Materials
Status	Current
Supersedes	ASTM E 1438 : 2011