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BS EN ISO 14644-10:2013

Superseded
Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by
superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

Cleanrooms and associated controlled environments Part 10: Classification of surface cleanliness by chemical concentration
Available format(s)

Hardcopy , PDF

Superseded date

13-07-2022

Language(s)

English

Published date

30-04-2013

This part of ISO14644 defines the classification system for cleanliness of surfaces in cleanrooms with regard to the presence of chemical compounds or elements (including molecules, ions, atoms and particles). This part of ISO14644 is applicable to all solid surfaces in cleanrooms and associated controlled environments such as walls, ceilings, floors, working environment, tools, equipment and devices.

NOTE 1 For the purpose of this part of ISO14644, consideration is only given to the chemical characteristics of a particle. The physical properties of the particle are not considered and this part of ISO14644 does not cover the interaction between the contamination and the surface.

NOTE 2 This part of ISO14644 does not include the contamination generation process and any time-dependent influences (deposition, sedimentation, ageing, etc.) or process-dependent activities such as transportation and handling. Neither does it include guidance on statistical quality control techniques to ensure compliance.

Committee
LBI/30
DevelopmentNote
Supersedes 11/30196563 DC. (04/2013)
DocumentType
Standard
Pages
40
PublisherName
British Standards Institution
Status
Superseded
SupersededBy
Supersedes

Standards Relationship
EN ISO 14644-10:2013 Identical
ISO 14644-10:2013 Identical

SEMI E46 : 2007 TEST METHOD FOR THE DETERMINATION OF ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING ION MOBILITY SPECTROMETRY (IMS)
ISO 17052:2007 Rubber, raw Determination of residual monomers and other volatile low-molecular-mass compounds by capillary gas chromatography Thermal desorption (dynamic headspace) method
ISO 14644-6:2007 Cleanrooms and associated controlled environments Part 6: Vocabulary
ISO 14644-8:2013 Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC)
ISO 18115-1:2013 Surface chemical analysis — Vocabulary — Part 1: General terms and terms used in spectroscopy
ISO 18116:2005 Surface chemical analysis Guidelines for preparation and mounting of specimens for analysis
ISO 10312:1995 Ambient air Determination of asbestos fibres Direct transfer transmission electron microscopy method
ISO 14644-9:2012 Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration

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