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BS EN ISO 14644-9:2012

Superseded
Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by
superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

Cleanrooms and associated controlled environments Classification of surface cleanliness by particle concentration
Available format(s)

Hardcopy , PDF

Superseded date

08-07-2022

Language(s)

English

Published date

31-08-2012

This part of ISO14644 establishes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics, are given in AnnexesA to D.

This part of ISO14644 applies to all solid surfaces in cleanrooms and associated controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and products. The classification of surface cleanliness by particle concentration (SCP) is limited to particles between 0,05µm and 500µm.

The following issues are not considered in this part of ISO14644:

  • requirements for the cleanliness and suitability of surfaces for specific processes;

  • procedures for the cleaning of surfaces;

  • material characteristics;

  • references to interactive bonding forces or generation processes that are usually time-dependent and process-dependent;

  • selection and use of statistical methods for classification and testing;

  • other characteristics of particles, such as electrostatic charge, ionic charges, microbiological state, etc.

Committee
LBI/30
DevelopmentNote
Supersedes 08/30190157 DC. (08/2012)
DocumentType
Standard
Pages
36
PublisherName
British Standards Institution
Status
Superseded
SupersededBy
Supersedes

Standards Relationship
EN ISO 14644-9:2012 Identical
ISO 14644-9:2012 Identical

SEMI E78 : 2012 GUIDE TO ASSESS AND CONTROL ELECTROSTATIC DISCHARGE (ESD) AND ELECTROSTATIC ATTRACTION (ESA) FOR EQUIPMENT
ISO 14644-6:2007 Cleanrooms and associated controlled environments Part 6: Vocabulary
ISO 4287:1997 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
ISO 10015:1999 Quality management Guidelines for training
ISO 16232-3:2007 Road vehicles Cleanliness of components of fluid circuits Part 3: Method of extraction of contaminants by pressure rinsing
IEC 61340-5-1:2016 Electrostatics - Part 5-1: Protection of electronic devices from electrostatic phenomena - General requirements
ISO 16232-2:2007 Road vehicles Cleanliness of components of fluid circuits Part 2: Method of extraction of contaminants by agitation
ISO 16232-5:2007 Road vehicles Cleanliness of components of fluid circuits Part 5: Method of extraction of contaminants on functional test bench
ISO 16232-4:2007 Road vehicles Cleanliness of components of fluid circuits Part 4: Method of extraction of contaminants by ultrasonic techniques
ISO 10576-1:2003 Statistical methods — Guidelines for the evaluation of conformity with specified requirements — Part 1: General principles
SEMI E43 : 2013 RECOMMENDED PRACTICE FOR ELETROSTATIC MEASUREMENTS ON OBJECTS AND SURFACES
IEST RP CC022.2 : 2004(R2008) ELECTROSTATIC CHARGE IN CLEANROOMS AND OTHER CONTROLLED ENVIRONMENTS
ISO/TS 21748:2004 Guidance for the use of repeatability, reproducibility and trueness estimates in measurement uncertainty estimation
CLC/TR 61340-5-2:2008 Electrostatics - Part 5-2: Protection of electronic devices from electrostatic phenomena - User guide
IEST STD CC1246 : 2013 PRODUCT CLEANLINESS LEVELS - APPLICATIONS, REQUIREMENTS, AND DETERMINATION
ISO 5725-2:1994 Accuracy (trueness and precision) of measurement methods and results Part 2: Basic method for the determination of repeatability and reproducibility of a standard measurement method

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