Geometrical product specifications (GPS). Surface texture: Areal Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

31-10-2013

Publisher

British Standards Institution

Foreword
Introduction
1 Scope
2 Terms and definitions
3 Descriptions of the influence quantities
Annex A (informative) Components of a phase-shifting
        interferometric (PSI) microscope
Annex B (informative) - Phase-shifting interferometric
        (PSI) microscope - Theory of operation
Annex C (informative) - Errors and corrections for
        phase-shifting interferometric (PSI) microscopes
Annex D (informative) - Relation to the GPS
        matrix model
Bibliography

Defines the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

This part of ISO25178 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.

Committee	TPR/1
DocumentType	Standard
Pages	40
PublisherName	British Standards Institution
Status	Current

Standards	Relationship
ISO 25178-603:2013	Identical
EN ISO 25178-603:2013	Identical

ISO/TR 14638:1995	Geometrical product specification (GPS) Masterplan
ISO 8015:2011	Geometrical product specifications (GPS) Fundamentals Concepts, principles and rules
ISO 4287:1997	Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
ISO 14978:2006	Geometrical product specifications (GPS) General concepts and requirements for GPS measuring equipment
ISO 25178-6:2010	Geometrical product specifications (GPS) Surface texture: Areal Part 6: Classification of methods for measuring surface texture
ISO 10934-2:2007	Optics and optical instruments Vocabulary for microscopy Part 2: Advanced techniques in light microscopy
ISO 14253-1:2017	Geometrical product specifications (GPS) — Inspection by measurement of workpieces and measuring equipment — Part 1: Decision rules for verifying conformity or nonconformity with specifications
ASME B46.1 : 2009	SURFACE TEXTURE (SURFACE ROUGHNESS, WAVINESS, AND LAY)
ISO 25178-3:2012	Geometrical product specifications (GPS) — Surface texture: Areal — Part 3: Specification operators
ISO/IEC Guide 99:2007	International vocabulary of metrology Basic and general concepts and associated terms (VIM)
ISO 25178-601:2010	Geometrical product specifications (GPS) — Surface texture: Areal — Part 601: Nominal characteristics of contact (stylus) instruments
ISO 25178-602:2010	Geometrical product specifications (GPS) — Surface texture: Areal — Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments
ISO 25178-2:2012	Geometrical product specifications (GPS) Surface texture: Areal Part 2: Terms, definitions and surface texture parameters

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BS EN ISO 25178-603:2013

Current

Table of Contents

Abstract

Scope

General Product Information

International Equivalents

Standards Referencing This Book

Category

Subcategory

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