Surface chemical analysis. Auger electron spectroscopy. Repeatability and constancy of intensity scale

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

12-05-2005

Publisher

British Standards Institution

Foreword
Introduction
1 Scope
2 Symbols
3 Outline of method
4 Method for evaluating the repeatability and constancy
  of the intensity scale
  4.1 Obtaining the reference sample
  4.2 Mounting the sample
  4.3 Cleaning the sample
  4.4 Choosing the spectrometer settings for which intensity
       stability is to be determined
  4.5 Operating the instrument
  4.6 Options for initial or subsequent evaluation measurements
  4.7 Measurements for the intensity and repeatability
  4.8 Calculating the peak intensities, intensity ratios
       and uncertainties
  4.9 Procedure for the regular evaluation of the
       constancy of the intensity scale
  4.10 Next evaluation
Annex A (informative) Example of calculations and
                      measurements of the intensity
                      repeatability for a commercial
                      Auger electron spectrometer
Bibliography

Defines a method for evaluating the constancy and repeatability of the intensity scale of Auger electron spectrometers, for general analytical purposes, using an electron gun with a beam energy of 2 keV or greater. It is only applicable to instruments that incorporate an ion gun for sputter cleaning.

This International Standard specifies a method for evaluating the constancy and repeatability of the intensity scale of Auger electron spectrometers, for general analytical purposes, using an electron gun with a beam energy of 2 keV or greater. It is only applicable to instruments that incorporate an ion gun for sputter cleaning. It is not intended to be a calibration of the intensity/energy response function. That calibration may be made by the instrument manufacturer or other organization. The present procedure provides data to evaluate and confirm the accuracy with which the intensity/energy response function remains constant with instrument usage. Guidance is given on some of the instrumental settings that may affect this constancy.

Committee	CII/60
DevelopmentNote	Supersedes 04/30109364 DC. (05/2005) Reviewed and confirmed by BSI, March 2016. (03/2016)
DocumentType	Standard
Pages	24
PublisherName	British Standards Institution
Status	Current
Supersedes	04/30109364 DC : DRAFT FEB 2004

Standards	Relationship
ISO 24236:2005	Identical

ISO 18118:2015	Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials
ISO 7873:1993	Control charts for arithmetic average with warning limits
ISO 15472:2010	Surface chemical analysis X-ray photoelectron spectrometers Calibration of energy scales
ISO 17973:2016	Surface chemical analysis — Medium-resolution Auger electron spectrometers — Calibration of energy scales for elemental analysis
ISO 7870:1993	Control charts General guide and introduction
ISO 17974:2002	Surface chemical analysis High-resolution Auger electron spectrometers Calibration of energy scales for elemental and chemical-state analysis

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BS ISO 24236:2005

Surface chemical analysis. Auger electron spectroscopy. Repeatability and constancy of intensity scale

Table of Contents

Abstract

Scope

General Product Information

International Equivalents

Standards Referencing This Book

Category

Subcategory