CGA G 14 : 2017
Current
The latest, up-to-date edition.
Hardcopy
English
24-08-2017
1 Introduction
2 Scope and purpose
3 Definitions
4 Properties of nitrogen trifluoride
5 Oxidizing and reactivity hazards
6 Nitrogen trifluoride handling equipment-general
considerations
7 Nitrogen trifluoride cylinder filling
8 Supply to point-of-use
9 Gas abatement systems-Basic principles of abatement
10 Emergency response
11 References
Appendix A - Audit checklist
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