Customer Support: 131 242

  • There are no items in your cart
We noticed you’re not on the correct regional site. Switch to our AMERICAS site for the best experience.
Dismiss alert

EN ISO 14644-14:2016

Current
Current

The latest, up-to-date edition.

Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016)
Published date

05-10-2016

European foreword
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 General outline of the assessment
5 Visual inspection
6 Assessment of suitability by airborne particle
  concentration measurements
7 Documentation
8 Statement on cleanroom suitability
Annex A (informative) - Example for data processing deriving
        from measurements
Annex B (informative) - Additional optional tests
Bibliography

ISO 14644-14:2016 specifies a methodology to assess the suitability of equipment (e.g. machinery, measuring equipment, process equipment, components and tools) for use in cleanrooms and associated controlled environments, with respect to airborne particle cleanliness as specified in ISO 14644‑1. Particle sizes range from 0,1 µm to equal to or larger than 5 µm (given in ISO 14644‑1).NOTE Where regulatory agencies impose supplementary guidelines or restrictions, appropriate adaptation of the assessment methodology can be required.The following items are not covered by this ISO 14644-14:2016:- assessment of suitability with respect to biocontamination;- testing for suitability of decontamination agents and techniques;- cleanability of equipment and materials;- requirements on design of equipment and selection of materials;- physical properties of materials (e.g. electrostatic, thermal properties);- optimizing performance of equipment for specific process applications;- selection and use of statistical methods for testing;- protocols and requirements for local safety regulations.

Committee
CEN/TC 243
DocumentType
Standard
PublisherName
Comite Europeen de Normalisation
Status
Current

SAE AIR1167:1970 ENVIRONMENTAL CRITERIA AND TESTS FOR AEROSPACE GROUND EQUIPMENT IN SUPPORT OF SPACE SYSTEMS
SEMI E49 : 2017 GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES
IEST RP CC026.2 : 2004 CLEANROOM OPERATIONS
ISO 8573-8:2004 Compressed air — Part 8: Test methods for solid particle content by mass concentration
SEMI F70 : 2011(R2017) TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM
ISO 14644-3:2005 Cleanrooms and associated controlled environments Part 3: Test methods
ISO 14644-7:2004 Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
IEST RP CC002.3 : 2009 UNIDIRECTIONAL-FLOW CLEAN-AIR DEVICES
VDI 2083 Blatt 9.1:2006-12 Clean room technology - Compatibility with required cleanliness and surface cleanliness
IEST RP CC013.3 : 2012 CALIBRATION PROCEDURES AND GUIDELINES FOR SELECT EQUIPMENT USED IN TESTING CLEANROOMS AND OTHER CONTROLLED ENVIRONMENTS
ISO 14644-9:2012 Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration
SEMI F28 : 2003(R2015) TEST METHOD FOR MEASURING PARTICLE GENERATION FROM PROCESS PANELS
IEST RP CC028.1 : 2002

View more information
Sorry this product is not available in your region.

Access your standards online with a subscription

Features

  • Simple online access to standards, technical information and regulations.

  • Critical updates of standards and customisable alerts and notifications.

  • Multi-user online standards collection: secure, flexible and cost effective.

Need help?
Call us on 131 242, then click here to start a Screen Sharing session
so we can help right away! Learn more