EN ISO 14644-14:2016
Current
The latest, up-to-date edition.
05-10-2016
European foreword
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 General outline of the assessment
5 Visual inspection
6 Assessment of suitability by airborne particle
concentration measurements
7 Documentation
8 Statement on cleanroom suitability
Annex A (informative) - Example for data processing deriving
from measurements
Annex B (informative) - Additional optional tests
Bibliography
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