I.S. EN 61300-3-16:2003
Current
The latest, up-to-date edition.
Hardcopy , PDF
English
01-01-2003
For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.
Only cited Standards give presumption of conformance to New Approach Directives/Regulations.
FOREWORD
1 Scope
2 Normative reference
3 General description
4 Apparatus
4.1 Method 1 - Two-dimensional surface analysis
4.2 Method 2 - Two-dimensional surface analysis by
interferometry system
4.3 Method 3 - Three-dimensional surface analysis
by interferometry system
5 Procedure
5.1 Measurement region
5.2 Method 1 - Two-dimensional surface analysis
5.3 Method 2 - Two-dimensional surface analysis by
interferometry system
5.4 Method 3 - Three dimensional surface analysis by
interferometry system
6 Details to be specified
6.1 Method 1 - Two-dimensional surface analysis
6.2 Method 2 - Two-dimensional surface analysis by
interferometry system
6.3 Three-dimensional surface analysis by interferometry
system
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