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SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 4: GENERIC SPECIFICATION FOR MEMS

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

01-01-2010

Publisher

National Standards Authority of Ireland

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FOREWORD
1 Scope
2 Normative references
3 Terms, definitions, units and symbols
4 Standard environmental conditions
5 Marking
6 Quality assessment procedures
7 Test and measurement procedures
Annex A (normative) - Sampling procedures
Annex B (informative) - Classification for MEMS technologies
        and devices
Bibliography
Annex ZA (normative) - Normative references to international
         publications with their corresponding European
         publications

Specifies generic specifications for micro-electromechanical systems (MEMS) made by semiconductors, which are the basis for specifications given in other parts of this series for various types of MEMS applications such as sensors, RF MEMS, excluding optical MEMS, bio MEMS, micro TAS, and power MEMS.

DevelopmentNote	For CENELEC adoptions of IEC publications, please check www.iec.ch to be sure that you have any corrigenda that may apply. (01/2017)
DocumentType	Standard
Pages	25
PublisherName	National Standards Authority of Ireland
Status	Current

IEC 61193-2:2007	Quality assessment systems - Part 2: Selection and use of sampling plans for inspection of electronic components and packages
IECQ 001002-3:2005	IEC QUALITY ASSESSMENT SYSTEM FOR ELECTRONIC COMPONENTS (IECQ) - RULES OF PROCEDURE - PART 3: APPROVAL PROCEDURES
EN 62047-1:2016	Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
IEC 60410:1973	Sampling plans and procedures for inspection by attributes
IEC 60721-2-1:2013	Classification of environmental conditions - Part 2-1: Environmental conditions appearing in nature - Temperature and humidity
IEC 62047-1:2016	Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
EN 61193-2 : 2007	QUALITY ASSESSMENT SYSTEMS - PART 2: SELECTION AND USE OF SAMPLING PLANS FOR INSPECTION OF ELECTRONIC COMPONENTS AND PACKAGES
IEC 60721-3-0:1984+AMD1:1987 CSV	Classification of environmental conditions - Part 3: Classification of groups of environmental parameters and their severities - Introduction
IEC 60747-1:2006+AMD1:2010 CSV	Semiconductor devices - Part 1: General
IEC 60721-3-1:1997	Classification of environmental conditions - Part 3 Classification of groups of environmental parameters and their severities - Section 1: Storage