CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 15: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT AND MATERIALS BY AIRBORNE CHEMICAL CONCENTRATION (ISO 14644-15:2017)

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

01-01-2017

Publisher

National Standards Authority of Ireland

Preview

For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.

Only cited Standards give presumption of conformance to New Approach Directives/Regulations.

National Foreword
European foreword
Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols
5 Test setup
6 Representative mode
7 Visual inspection
8 Test description
9 Calculation of the measured concentrations
10 Calculation of specific emission rate
11 Assessment
12 Documentation
Annex A (informative) - Example calculation for
        suitability assessment of one equipment
        (existing installation)
Annex B (informative) - Example calculation for
        suitability assessment of wall material
        (existing cleanroom/clean zone installation)
Annex C (informative) - Suitability assessment of a
        combination of equipment and floor
        material in a cleanroom to be designed
Bibliography

Defines requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration.

DocumentType	Standard
Pages	38
PublisherName	National Standards Authority of Ireland
Status	Current

Standards	Relationship
EN ISO 14644-15:2017	Identical

IEST RP CC002 : 1998	RECOMMENDED PRACTICE FOR LAMINAR FLOW CLEAN AIR DEVICES
SAE AIR1167:1970	ENVIRONMENTAL CRITERIA AND TESTS FOR AEROSPACE GROUND EQUIPMENT IN SUPPORT OF SPACE SYSTEMS
ISO 14644-8:2013	Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC)
SEMI E49 : 2017	GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES
IEST RP CC026.2 : 2004	CLEANROOM OPERATIONS
ISO 8573-8:2004	Compressed air — Part 8: Test methods for solid particle content by mass concentration
SEMI F70 : 2011(R2017)	TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM
ISO 14644-14:2016	Cleanrooms and associated controlled environments Part 14: Assessment of suitability for use of equipment by airborne particle concentration
ISO 2889:2010	Sampling airborne radioactive materials from the stacks and ducts of nuclear facilities
IEST RP CC013 : 86-T	EQUIPMENT CALIBRATION OR VALIDATION PROCEDURES
ISO 16000-9:2006	Indoor air — Part 9: Determination of the emission of volatile organic compounds from building products and furnishing — Emission test chamber method
ISO 14644-1:2015	Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
ISO 16000-6:2011	Indoor air Part 6: Determination of volatile organic compounds in indoor and test chamber air by active sampling on Tenax TA sorbent, thermal desorption and gas chromatography using MS or MS-FID
SEMI F28 : 2003(R2015)	TEST METHOD FOR MEASURING PARTICLE GENERATION FROM PROCESS PANELS
IEST RP CC028.1 : 2002

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I.S. EN ISO 14644-15:2017

Current

Table of Contents

Abstract

General Product Information

International Equivalents

Standards Referencing This Book

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