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GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: AREAL - PART 604: NOMINAL CHARACTERISTICS OF NON-CONTACT (COHERENCE SCANNING INTERFEROMETRY) INSTRUMENTS (ISO 25178-604:2013)

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

01-01-2013

Publisher

National Standards Authority of Ireland

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For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.

Only cited Standards give presumption of conformance to New Approach Directives/Regulations.

Foreword
Introduction
1 Scope
2 Terms and definitions
3 Descriptions of the influence quantities
Annex A (informative) - Overview and components
        of a coherence scanning interferometry
        (CSI) microscope
Annex B (informative) - Coherence scanning interferometry
        (CSI) theory of operation
Annex C (informative) - Spatial resolution
Annex D (informative) - Example procedure for estimating
        surface topography repeatability
Annex E (informative) - Relation to the GPS matrix model
Bibliography

Defines the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.

DocumentType	Standard
Pages	55
PublisherName	National Standards Authority of Ireland
Status	Current

Standards	Relationship
EN ISO 25178-604:2013	Identical
ISO 25178-604:2013	Identical

ISO/TR 14638:1995	Geometrical product specification (GPS) Masterplan
ISO 8015:2011	Geometrical product specifications (GPS) Fundamentals Concepts, principles and rules
ISO 4287:1997	Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
ISO 14978:2006	Geometrical product specifications (GPS) General concepts and requirements for GPS measuring equipment
ISO 25178-6:2010	Geometrical product specifications (GPS) Surface texture: Areal Part 6: Classification of methods for measuring surface texture
ISO 10934-2:2007	Optics and optical instruments Vocabulary for microscopy Part 2: Advanced techniques in light microscopy
ISO 14253-1:2017	Geometrical product specifications (GPS) — Inspection by measurement of workpieces and measuring equipment — Part 1: Decision rules for verifying conformity or nonconformity with specifications
ISO 25178-3:2012	Geometrical product specifications (GPS) — Surface texture: Areal — Part 3: Specification operators
ISO/IEC Guide 99:2007	International vocabulary of metrology Basic and general concepts and associated terms (VIM)
ISO 3274:1996	Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments
ISO 9334:2007	Optics and photonics Optical transfer function Definitions and mathematical relationships
ISO 25178-601:2010	Geometrical product specifications (GPS) — Surface texture: Areal — Part 601: Nominal characteristics of contact (stylus) instruments
ISO 25178-602:2010	Geometrical product specifications (GPS) — Surface texture: Areal — Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments
ISO 25178-2:2012	Geometrical product specifications (GPS) Surface texture: Areal Part 2: Terms, definitions and surface texture parameters

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I.S. EN ISO 25178-604:2013

GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: AREAL - PART 604: NOMINAL CHARACTERISTICS OF NON-CONTACT (COHERENCE SCANNING INTERFEROMETRY) INSTRUMENTS (ISO 25178-604:2013)

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