THE RATE OF DEPOSITION OF NONVOLATILE RESIDUE IN CLEANROOMS

Available format(s)

Hardcopy

Language(s)

English

Published date

12-01-2013

Publisher

Institute of Environmental Sciences and Technology

Contains a uniform method and basis for determining the rate of deposition of nonvolatile residue (NVR) on surfaces in cleanrooms. In the design of the heating,

DevelopmentNote	Supersedes IES RP CC016.1. (12/2002)
DocumentType	Standard
Pages	20
PublisherName	Institute of Environmental Sciences and Technology
Status	Current
Supersedes	IEST RP CC016.1 : 1997

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IEST RP CC016.2 : 2002(R2006)

THE RATE OF DEPOSITION OF NONVOLATILE RESIDUE IN CLEANROOMS

Abstract

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