Nanotechnologies. Description, measurement and dimensional quality parameters of artificial gratings

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

28-02-2013

Publisher

British Standards Institution

FOREWORD
INTRODUCTION
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviated terms
5 Grating calibration and quality characterization methods
6 Reporting of grating characterization results
Annex A (informative) - Background information and examples
Annex B (informative) - Bravais lattices
Bibliography

Defines the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination.

This technical specification specifies the generic terminology for the global and local quality parameters of artificial gratings, interpreted in terms of deviations from nominal positions of grating features, and provides guidance on the categorization of measurement and evaluation methods for their determination.

This specification is intended to facilitate communication among manufacturers, users and calibration laboratories dealing with the characterization of the dimensional quality parameters of artificial gratings used in nanotechnology.

This specification supports quality assurance in the production and use of artificial gratings in different areas of application in nanotechnology. Whilst the definitions and described methods are universal to a large variety of different gratings, the focus is on one-dimensional (1D) and two-dimensional (2D) gratings.

Committee	NTI/1
DocumentType	Standard
Pages	44
PublisherName	British Standards Institution
Status	Current

Standards	Relationship
IEC TS 62622:2012	Identical

ISO 16700:2016	Microbeam analysis — Scanning electron microscopy — Guidelines for calibrating image magnification
ISO/IEC 17025:2005	General requirements for the competence of testing and calibration laboratories
ISO 15902:2004	Optics and photonics Diffractive optics Vocabulary
ISO 29301:2010	Microbeam analysis Analytical transmission electron microscopy Methods for calibrating image magnification by using reference materials having periodic structures
GOST R 8-631 : 2007 AMD 1 2011	STATE SYSTEM FOR ENSURING THE UNIFORMITY OF MEASUREMENTS - SCANNING ELECTRON MEASURING MICROSCOPES - METHODS FOR VERIFICATION
GOST R 8-630 : 2007 AMD 1 2011	STATE SYSTEM FOR ENSURING THE UNIFORMITY OF MEASUREMENTS - ATOMIC-FORCE SCANNING PROBE MEASURING MICROSCOPES - METHODS FOR VERIFICATION
GOST R 8-635 : 2007	STATE SYSTEM FOR ENSURING THE UNIFORMITY OF MEASUREMENTS - ATOMIC-FORCE SCANNING PROBE MICROSCOPES - METHOD FOR CALIBRATION
ISO/TS 80004-1:2015	Nanotechnologies — Vocabulary — Part 1: Core terms
OIML R 98 : 1991	HIGH-PRECISION LINE MEASURES OF LENGTH
ISO/TS 16610-1:2006	Geometrical product specifications (GPS) Filtration Part 1: Overview and basic concepts
ISO 14660-1:1999	Geometrical Product Specifications (GPS) Geometrical features Part 1: General terms and definitions
SEMI P35 : 2006(R2013)	TERMINOLOGY FOR MICROLITHOGRAPHY METROLOGY
GOST R 8-628 : 2007 AMD 1 2011	STATE SYSTEM FOR ENSURING THE UNIFORMITY OF MEASUREMENTS - SINGLE-CRYSTAL SILICON NANOMETER RANGE RELIEF MEASURES - REQUIREMENTS FOR GEOMETRICAL SHAPES, LINEAR SIZES AND MANUFACTURING MATERIAL SELECTION
GOST R 8-644 : 2008	STATE SYSTEM FOR ENSURING THE UNIFORMITY OF MEASUREMENTS - NANOMETER RANGE RELIEF MEASURES WITH TRAPEZOIDAL PROFILE OF ELEMENTS - METHODS FOR CALIBRATION
GOST R 8-629 : 2007 AMD 1 2011	STATE SYSTEM FOR ENSURING THE UNIFORMITY OF MEASUREMENTS - NANOMETER RANGE RELIEF MEASURES WITH TRAPEZOIDAL PROFILE OF ELEMENTS - METHODS FOR VERIFICATION
GOST R 8-636 : 2007	STATE SYSTEM FOR ENSURING THE UNIFORMITY OF MEASUREMENTS - SCANNING ELECTRON MICROSCOPES - METHODS FOR CALIBRATION

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PD IEC/TS 62622:2012

Current

Table of Contents

Abstract

Scope

General Product Information

International Equivalents

Standards Referencing This Book

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