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SEMI C57 : 2017

Current
Current

The latest, up-to-date edition.

SPECIFICATION FOR ARGON
Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Specifies a series of specifications for different grades of argon (Ar) that are used in the semiconductor industry.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. Supersedes SEMI C3-1, SEMI C3.42 & SEMI C3.46. (02/2005)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
Supersedes

SEMI F70 : 2011(R2017) TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM

SEMI C3 : 2017 SPECIFICATIONS FOR GASES
SEMI C1 : 2010 GUIDE FOR THE ANALYSIS OF LIQUID CHEMICALS

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