Customer Support: 131 242

  • There are no items in your cart
We noticed you’re not on the correct regional site. Switch to our AMERICAS site for the best experience.
Dismiss alert

SEMI C7.15 : 1991

Superseded
Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by
superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

GUIDELINE FOR 1,1,1-TRICHLOROETHANE, FURNACE GRADE, TIER A
Superseded date

01-06-1999

Published date

12-01-2013

Specific to 1,1,1 Trichloroethane, Furnace Grade, Tier A. Tier A refers to first generation Guidelines. Tier A Guidelines are intended to describe the quality required to produce IC's whose critical dimensions lie in the range of 0.8 to 1.2 microns and greater, with most trace metal specifications near 10 ppb. They are designated by "SEMI C7._", and in general become Grade 2 standards upon approval of a validated analytical quality control method. Tier A guidelines were developed by the North American Process Chemicals Committee, and approved through SEMI's International ballot methods.

DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Superseded
SupersededBy

View more information
Sorry this product is not available in your region.

Access your standards online with a subscription

Features

  • Simple online access to standards, technical information and regulations.

  • Critical updates of standards and customisable alerts and notifications.

  • Multi-user online standards collection: secure, flexible and cost effective.

Need help?
Call us on 131 242, then click here to start a Screen Sharing session
so we can help right away! Learn more