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SEMI
SEMI C77 : 2012

SEMI C77 : 2012

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Current

The latest, up-to-date edition.

TEST METHOD FOR DETERMINING THE COUNTING EFFICIENCY OF LIQUID-BORNE PARTICLE COUNTERS FOR WHICH THE MINIMUM DETECTABLE PARTICLE SIZE IS BETWEEN 30 NM AND 100 NM

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Contains the counting efficiency test system for liquid-borne particle counters by using the quantified particle number concentration sample.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (10/2012)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current
SupersededBy

SEMI F63 : 2016 GUIDE FOR ULTRAPURE WATER USED IN SEMICONDUCTOR PROCESSING
SEMI F104 : 2012 PARTICLE TEST METHOD GUIDE FOR EVALUATION OF COMPONENTS USED IN ULTRAPURE WATER AND LIQUID CHEMICAL DISTRIBUTION SYSTEMS

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