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SEMI E49.5 : 2004

Current
Current

The latest, up-to-date edition.

GUIDE FOR ULTRAHIGH PURITY SOLVENT DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING EQUIPMENT
Published date

12-01-2013

Describes guidelines for ultrahigh purity (UHP) solvent distribution systems in semiconductor production equipment. The distribution systems consist of stainless steel (SS) piping designed to supply flammable solvents only. Typical tools include photolithography track equipment, solvent wet stations, and isopropyl alcohol vapor dryers.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (10/2004) Not available separately, Published within the SEMI E49 family of standards. (02/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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SEMI E49 : 2017 GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES
SEMI F81 : 2011(R2017) SPECIFICATION FOR VISUAL INSPECTION AND ACCEPTANCE OF GAS TUNGSTEN ARC (GTA) WELDS IN FLUID DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING APPLICATIONS
SEMI F32 : 2011 TEST METHOD FOR DETERMINING OF FLOW COEFFICIENT FOR HIGH PURITY SHUTOFF VALVES
SEMI F73 : 2014 TEST METHOD FOR SCANNING ELECTRON MICROSCOPY (SEM) EVALUATION OF WETTED SURFACE CONDITION OF STAINLESS STEEL COMPONENTS
SEMI F1 : 2012 SPECIFICATION FOR LEAK INTEGRITY OF HIGH-PURITY GAS PIPING SYSTEMS AND COMPONENTS
SEMI F78 : 2011(R2017) PRACTICE FOR GAS TUNGSTEN ARC (GTA) WELDING OF FLUID DISTRIBUTION SYSTEMS IN SEMICONDUCTOR MANUFACTURING APPLICATIONS
SEMI F19 : 2015 SPECIFICATION FOR THE SURFACE CONDITION OF THE WETTED SURFACES OF STAINLESS STEEL COMPONENTS
SEMI F60 : 2014 TEST METHOD FOR ESCA EVALUATION OF SURFACE COMPOSITION OF WETTED SURFACES OF PASSIVATED 316L STAINLESS STEEL COMPONENTS
SEMI F20 : 2006E(R2017) SPECIFICATION FOR 316L STAINLESS STEEL BAR, FORGINGS, EXTRUDED SHAPES, PLATE, AND TUBING FOR COMPONENTS USED IN GENERAL PURPOSE, HIGH PURITY AND ULTRA-HIGH PURITY SEMICONDUCTOR MANUFACTURING APPLICATIONS
SEMI E49.6 : 2003(R2011) GUIDE FOR SUBSYSTEM ASSEMBLY AND TESTING PROCEDURES - STAINLESS STEEL SYSTEMS

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