SEMI E49.5 : 2004
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The latest, up-to-date edition.
12-01-2013
Describes guidelines for ultrahigh purity (UHP) solvent distribution systems in semiconductor production equipment. The distribution systems consist of stainless steel (SS) piping designed to supply flammable solvents only. Typical tools include photolithography track equipment, solvent wet stations, and isopropyl alcohol vapor dryers.
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