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SEMI E49.6 : 2003(R2011)

SEMI E49.6 : 2003(R2011)

Current

Current

The latest, up-to-date edition.

GUIDE FOR SUBSYSTEM ASSEMBLY AND TESTING PROCEDURES - STAINLESS STEEL SYSTEMS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Ascertains standard guidelines for cleanroom activities specific to the manufacturing, assembly, testing, and integration of materials and components used in stainless steel semiconductor manufacturing equipment.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (11/2003) Not available separately, Published within the SEMI E49 family of standards. (02/2009)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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