Name: SEMI F21 : 2016
Brand: SEMI

CLASSIFICATION OF AIRBORNE MOLECULAR CONTAMINANT LEVELS IN CLEAN ENVIRONMENTS

Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Pertains to classify microelectronics clean environments with respect to their molecular (non-particulate) contaminant levels.

DevelopmentNote	Not available for sale from ILI, customer to contact SEMI. (05/2001)
DocumentType	Standard
PublisherName	Semiconductor Equipment & Materials Institute
Status	Current

11/30248115 DC : 0	BS EN ISO 14644-8 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION
UNE-EN ISO 14644-8:2014	Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2013)
DIN EN ISO 14644-8:2013-06	Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2013)
SEMI F51 : 2017	GUIDE FOR ELASTOMERIC SEALING TECHNOLOGY
I.S. EN ISO 14644-8:2013	CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION (ACC) (ISO 14644-8:2013)
BS EN ISO 14644-8:2013	Cleanrooms and associated controlled environments Classification of air cleanliness by chemical concentration (ACC)
UNI EN ISO 14644-8 : 2013	CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION
SEMI E108 : 2007	TEST METHOD FOR THE ASSESSMENT OF OUTGASSING ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING GAS CHROMATOGRAPHY/MASS SPECTROSCOPY
EN ISO 14644-8:2013	Cleanrooms and associated controlled environments - Part 8: Classification of air cleanliness by chemical concentration (ACC) (ISO 14644-8:2013)
PREN ISO 14644-8 : DRAFT 2011	CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION (ISO/DIS 14644-8:2011)

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