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SEMI F74 : 2003(R2010)

Current
Current

The latest, up-to-date edition.

TEST METHOD FOR THE PERFORMANCE AND EVALUATION OF METAL SEAL DESIGNS FOR USE IN GAS DELIVERY SYSTEMS
Published date

12-01-2013

Publisher

Semiconductor Equipment & Materials Institute

Helps in evaluating metal seal designs use in gas delivery systems. Also defines both surface-mounted gas systems and conventional metal face seal fitting systems. Also pertains to the connection seals used in conventional tubing type gas systems and between modules and components to the substrates used in surface-mounted gas systems.

DevelopmentNote
Not available for sale from ILI, customer to contact SEMI. (01/2003)
DocumentType
Standard
PublisherName
Semiconductor Equipment & Materials Institute
Status
Current

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