Name: UNI EN ISO 14644-10 : 2013
Brand: UNI

UNI EN ISO 14644-10 : 2013

Superseded

CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 10: CLASSIFICATION OF SURFACE CLEANLINESS BY CHEMICAL CONCENTRATION

Superseded date

14-07-2022

Published date

04-04-2013

Publisher

Ente Nazionale Italiano di Unificazione (UNI)

Foreword
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Measuring and monitoring the cleanliness of
  surfaces for chemical contamination and
  demonstration of compliance
Annex A (informative) - Conversion between different
        unit expressions of surface concentration for
        chemical substances
Annex B (informative) - Parameters influencing testing
        and interpretation of results
Annex C (informative) - Essential considerations for
        a good cleanliness assessment
Annex D (informative) - Methods for testing surface
        cleanliness by chemical concentration
Annex E (informative) - Test record documentation
Bibliography

This part of ISO 14644 covers the classification of air chemical cleanliness (ACC) in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time-weighted factors within the specification for classification.

Committee	CT 44
DocumentType	Test Method
PublisherName	Ente Nazionale Italiano di Unificazione (UNI)
Status	Superseded
SupersededBy	UNI EN ISO 14644-10:2022
Supersedes	UNI EN ISO 14644-8 : 2007

Standards	Relationship
ISO 14644-10:2013	Identical
EN ISO 14644-10:2013	Identical

SEMI E46 : 2007	TEST METHOD FOR THE DETERMINATION OF ORGANIC CONTAMINATION FROM MINIENVIRONMENTS USING ION MOBILITY SPECTROMETRY (IMS)
ISO 17052:2007	Rubber, raw Determination of residual monomers and other volatile low-molecular-mass compounds by capillary gas chromatography Thermal desorption (dynamic headspace) method
ISO 14644-6:2007	Cleanrooms and associated controlled environments Part 6: Vocabulary
ISO 14644-8:2013	Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC)
ISO 18115-1:2013	Surface chemical analysis — Vocabulary — Part 1: General terms and terms used in spectroscopy
ISO 18116:2005	Surface chemical analysis Guidelines for preparation and mounting of specimens for analysis
ISO 14644-1:2015	Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
ISO 10312:1995	Ambient air Determination of asbestos fibres Direct transfer transmission electron microscopy method
ISO 14644-9:2012	Cleanrooms and associated controlled environments Part 9: Classification of surface cleanliness by particle concentration