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UNI EN ISO 25178-604 : 2013

Current
Current

The latest, up-to-date edition.

GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: AREAL - PART 604: NOMINAL CHARACTERISTICS OF NON-CONTACT (COHERENCE SCANNING INTERFEROMETRY) INSTRUMENTS
Published date

03-10-2013

Foreword
Introduction
1 Scope
2 Terms and definitions
3 Descriptions of the influence quantities
Annex A (informative) - Overview and components
        of a coherence scanning interferometry
        (CSI) microscope
Annex B (informative) - Coherence scanning interferometry
        (CSI) theory of operation
Annex C (informative) - Spatial resolution
Annex D (informative) - Example procedure for estimating
        surface topography repeatability
Annex E (informative) - Relation to the GPS matrix model
Bibliography

Defines the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.

Committee
CT 47
DocumentType
Standard
PublisherName
Ente Nazionale Italiano di Unificazione (UNI)
Status
Current

Standards Relationship
EN ISO 25178-604:2013 Identical
ISO 25178-604:2013 Identical

ISO/TR 14638:1995 Geometrical product specification (GPS) Masterplan
ISO 8015:2011 Geometrical product specifications (GPS) Fundamentals Concepts, principles and rules
ISO 4287:1997 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
ISO 14978:2006 Geometrical product specifications (GPS) General concepts and requirements for GPS measuring equipment
ISO 25178-6:2010 Geometrical product specifications (GPS) Surface texture: Areal Part 6: Classification of methods for measuring surface texture
ISO 10934-2:2007 Optics and optical instruments Vocabulary for microscopy Part 2: Advanced techniques in light microscopy
ISO 14253-1:2017 Geometrical product specifications (GPS) — Inspection by measurement of workpieces and measuring equipment — Part 1: Decision rules for verifying conformity or nonconformity with specifications
ISO 25178-603:2013 Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
ISO 25178-3:2012 Geometrical product specifications (GPS) — Surface texture: Areal — Part 3: Specification operators
ISO/IEC Guide 99:2007 International vocabulary of metrology Basic and general concepts and associated terms (VIM)
ISO 3274:1996 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Nominal characteristics of contact (stylus) instruments
VDI/VDE 2655 Blatt 1.1:2008-03 Optical measurement and microtopographies - Calibration of interference microscopes and depth measurement standards for roughness measurement
ISO 9334:2007 Optics and photonics Optical transfer function Definitions and mathematical relationships
ISO 25178-601:2010 Geometrical product specifications (GPS) — Surface texture: Areal — Part 601: Nominal characteristics of contact (stylus) instruments
ISO 25178-602:2010 Geometrical product specifications (GPS) — Surface texture: Areal — Part 602: Nominal characteristics of non-contact (confocal chromatic probe) instruments
ISO 25178-2:2012 Geometrical product specifications (GPS) Surface texture: Areal Part 2: Terms, definitions and surface texture parameters

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