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VDI 2083 Blatt 9.1:2006-12

Superseded
Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by
superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

Clean room technology - Compatibility with required cleanliness and surface cleanliness
Available format(s)

Hardcopy , PDF

Superseded date

04-01-2021

Language(s)

German - English

Published date

01-12-2006

Publisher

Verlag des Vereins Deutscher Ingenieure

Preliminary note
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Classification
5 Requirements
6 Procedure for testing and
acceptance, metrology
7 Documentation
Annex A - Case study illustrating the
          procedure for reducing the number of
          measuring points
          (representative inference)
Annex B - Example of calculation for determining
          the cleanroom compatibility deriving
          from measurements
Annex C - Methods for determining the
          compatibility with the required
          cleanliness
Annex D - Indirect method for determining the
          challenge to the cleanroom (holistic
          method)
Annex E - Special tests for surface cleanliness
          and compatibility with the required
          cleanliness for the cleanroom trades
Bibliography

Provides guidance in the planning, creating, maintaining, restoring and demonstrating of the required compatibility of equipment and air-handling components with the required cleanliness in controlled environments as per VDI 2083 Part 1 and ISO 14644-1.

DevelopmentNote
Supersedes VDI 2083-4 and VDI 2083-8. (12/2007)
DocumentType
Standard
Pages
60
PublisherName
Verlag des Vereins Deutscher Ingenieure
Status
Superseded
SupersededBy
Supersedes

VDI 2083 Blatt 4:1996-02 Cleanroom technology - Surface cleanliness
UNE-EN ISO 14644-14:2017 Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016)
EN ISO 14644-14:2016 Cleanrooms and associated controlled environments - Part 14: Assessment of suitability for use of equipment by airborne particle concentration (ISO 14644-14:2016)
EN ISO 14644-15:2017 Cleanrooms and associated controlled environments - Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644-15:2017)
VDI 2083 Blatt 18:2012-01 Cleanroom technology - Biocontamination control
VDI 2083 Blatt 17:2013-06 Cleanroom technology - Compatibility of materials with the required cleanliness
VDI 2083 Blatt 15:2007-04 Cleanroom technology - Personnel at the clean work place
VDI 2083 Blatt 13.3:2010-10 Cleanroom technology - Quality, production, and distribution of ultrapure water - Pharmacy and other life-science applications
BS EN ISO 14644-15:2017 Cleanrooms and associated controlled environments Assessment of suitability for use of equipment and materials by airborne chemical concentration
VDI 2083 Blatt 9.2:2017-01 Cleanroom technology - Consumables in the cleanroom
VDI 2083 Blatt 8.1:2014-10 Cleanroom technology - Air cleanliness chemical concentration (ACC)
ISO 14644-15:2017 Cleanrooms and associated controlled environments — Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration
VDI 2083 Blatt 1:2013-01 Cleanroom technology - Particulate air cleanliness classes
BS EN ISO 14644-14:2016 ENISO 14644-14 environments — Assessment of suitability of equipment and materials for cleanrooms Assessment of suitability for use of equipment by airborne particle concentration
ISO 14644-14:2016 Cleanrooms and associated controlled environments Part 14: Assessment of suitability for use of equipment by airborne particle concentration
VDI 2083 Blatt 16.1:2010-08 Cleanroom technology - Barier systems (isolators, mini-environments, separative devices) - Effectiveness and certification

EN ISO 14644-4:2001 Cleanrooms and associated controlled environments - Part 4: Design, construction and start-up (ISO 14644-4:2001)
EN ISO 4287:1998/A1:2009 GEOMETRICAL PRODUCT SPECIFICATIONS (GPS) - SURFACE TEXTURE: PROFILE METHOD - TERMS, DEFINITIONS AND SURFACE TEXTURE PARAMETERS
ISO 9241-5:1998 Ergonomic requirements for office work with visual display terminals (VDTs) — Part 5: Workstation layout and postural requirements
ISO 4287:1997 Geometrical Product Specifications (GPS) — Surface texture: Profile method — Terms, definitions and surface texture parameters
EN 61340-5-1:2016/AC:2017-05 ELECTROSTATICS - PART 5-1: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA - GENERAL REQUIREMENTS (IEC 61340-5-1:2016/COR1:2017)
VDI 2083 Blatt 3:2005-07 Cleanroom technology - Metrology and test methods
DIN EN 1335-2:2016-09 (Draft) OFFICE FURNITURE - OFFICE WORK CHAIR - PART 2: SAFETY REQUIREMENTS
IEC 61340-5-1:2016 Electrostatics - Part 5-1: Protection of electronic devices from electrostatic phenomena - General requirements
VDI 2083 Blatt 10:1998-02 Cleanroom technology - High-Purity/Ultra-High-Purity (HP-/UHP-)media supply systems
EN 1335-3:2009/AC:2009 OFFICE FURNITURE - OFFICE WORK CHAIR - PART 3: TEST METHODS
DIN EN 61340-5-2 : 2002 ELECTROSTATICS - PART 5-2: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA; USER GUIDE
DIN EN 1335-1:2002-08 OFFICE FURNITURE - OFFICE WORK CHAIR - PART 1: DIMENSIONS - DETERMINATION OF DIMENSIONS
EN ISO 8785 : 1999 GEOMETRICAL PRODUCT SPECIFICATION (GPS) - SURFACE IMPERFECTIONS - TERMS, DEFINITIONS AND PARAMETERS
DIN EN ISO 9241-5:1999-08 ERGONOMIC REQUIREMENTS FOR OFFICE WORK WITH VISUAL DISPLAY TERMINALS (VDTS) - PART 5: WORKSTATION LAYOUT AND POSTURAL REQUIREMENTS
DIN EN ISO 14644-4:2003-06 Cleanrooms and associated controlled environments - Part 4: Design, construction and start up (ISO 14644-4:2001)
VDI 2815 Blatt 5:1978-05 Terms of production engineering and control; manufacturing accessories
SEMI E14 : 1993 MEASUREMENT OF PARTICLE CONTAMINATION CONTRIBUTED TO THE PRODUCT FROM THE PROCESS OR SUPPORT TOOL
DIN 55301:1978-09 PRESENTATION OF STATISTICAL TABLES
PREN ISO 14644-8 : DRAFT 2011 CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 8: CLASSIFICATION OF AIR CLEANLINESS BY CHEMICAL CONCENTRATION (ISO/DIS 14644-8:2011)
DIN EN 61340-5-1 : 2017 ELECTROSTATICS - PART 5-1: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA - GENERAL REQUIREMENTS (IEC 61340-5-1:2016)
DIN EN 1081:1998-04 RESILIENT FLOOR COVERINGS - DETERMINATION OF THE ELECTRICAL RESISTANCE
VDI 3489 Blatt 3:1997-03 Particulate matter measurement - Methods of characterizing and monitoring test aerosols - Optical particle counter
ASTM G 99 : 2017 : REDLINE Standard Test Method for Wear Testing with a Pin-on-Disk Apparatus
ISO 14644-7:2004 Cleanrooms and associated controlled environments — Part 7: Separative devices (clean air hoods, gloveboxes, isolators and mini-environments)
EN 1335-1 : 2000 COR 2002 OFFICE FURNITURE - OFFICE WORK CHAIR - PART 1: DIMENSIONS - DETERMINATION OF DIMENSIONS
VDI 2083 Blatt 7:2015-10 Cleanroom technology - Ultrapure media - Quality, supply, distribution
ISO 8785:1998 Geometrical Product Specification (GPS) — Surface imperfections — Terms, definitions and parameters
EN 1335-2:2009 Office furniture - Office work chair - Part 2: Safety requirements
ISO 14644-4:2001 Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up
EN 61340-5-2:2001/corrigendum:2001 ELECTROSTATICS - PART 5-2: PROTECTION OF ELECTRONIC DEVICES FROM ELECTROSTATIC PHENOMENA - USER GUIDE
EN 13779:2007 Ventilation for non-residential buildings - Performance requirements for ventilation and room-conditioning systems
VDI 2083 Blatt 9:1991-09 (Draft) Clean room engineering; quality, production and distribution of superpurity water
EN 1081:1998 Resilient floor coverings - Determination of the electrical resistance
DIN 50452-1:1995-11 TESTING OF MATERIALS FOR SEMICONDUCTOR TECHNOLOGY - TEST METHOD FOR PARTICLE ANALYSIS IN LIQUIDS - PART 1: MICROSCOPIC DETERMINATION OF PARTICLES

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Hardcopy - German - English
PDF - German - English
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