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    BS EN 62047-10 : 2011

    SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 10: MICRO-PILLAR COMPRESSION TEST FOR MEMS MATERIALS

    British Standards Institution

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    BS EN 62258-2 : 2011

    SEMICONDUCTOR DIE PRODUCTS - PART 2: EXCHANGE DATA FORMATS

    British Standards Institution

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    BS EN 62047-12 : 2011

    SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 12: BENDING FATIGUE TESTING METHOD OF THIN FILM MATERIALS USING RESONANT VIBRATION OF MEMS STRUCTURES (IEC 62047-12:2011)

    British Standards Institution

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    BS EN 62047-7 : 2011

    SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 7: MEMS BAW FILTER AND DUPLEXER FOR RADIO FREQUENCY CONTROL AND SELECTION

    British Standards Institution

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    I.S. EN 62047-25:2016

    SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 25: SILICON BASED MEMS FABRICATION TECHNOLOGY - MEASUREMENT METHOD OF PULL-PRESS AND SHEARING STRENGTH OF MICRO BONDING AREA

    National Standards Authority of Ireland

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    I.S. EN 62047-26:2016

    SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 26: DESCRIPTION AND MEASUREMENT METHODS FOR MICRO TRENCH AND NEEDLE STRUCTURES

    National Standards Authority of Ireland

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    I.S. EN 62047-1:2016

    SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 1: TERMS AND DEFINITIONS

    National Standards Authority of Ireland

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    DS/EN IEC 60747-17:2020

    Semiconductor devices – Part 17: Magnetic and capacitive coupler for basic and reinforced insulation

    Danish Standards

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    BS EN 62258-1 : 2010

    SEMICONDUCTOR DIE PRODUCTS - PART 1: PROCUREMENT AND USE

    British Standards Institution

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    BS EN 62047-6 : 2010

    SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 6: AXIAL FATIGUE TESTING METHODS OF THIN FILM MATERIALS

    British Standards Institution

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