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07/30163302 DC : 0

Superseded
Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

BS EN 62047-6 - SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 6: AXIAL FATIGUE TESTING METHODS OF THIN FILM MATERIALS
Available format(s)

Hardcopy , PDF

Superseded date

30-04-2010

Language(s)

English

BS EN 62047-6

Committee
EPL/47
DocumentType
Draft
Pages
18
PublisherName
British Standards Institution
Status
Superseded
SupersededBy

ASTM E 466 : 2015 : REDLINE Standard Practice for Conducting Force Controlled Constant Amplitude Axial Fatigue Tests of Metallic Materials
IEC 62047-2:2006 Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials
ISO 1099:2017 Metallic materials — Fatigue testing — Axial force-controlled method
ISO 12107:2012 Metallic materials — Fatigue testing — Statistical planning and analysis of data

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