13/30272270 DC : 0
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
Hardcopy , PDF
31-05-2014
English
Foreword
1 Scope
2 Normative references
3 Terms and definitions
4 Principle
5 Measuring apparatus
6 Preparation of s
7 Operation
8 Measurement
9 Calculation
10 Report
Annex A (informative) - Laser interferometer
Annex B (informative) - Temperature stability for homogeneity
measurements
Annex C (informative) - Measuring method using flatness
correction plates
Annex D (informative) - Flatness of the sample
Annex E (informative) - Method for obtaining PV value of
wavefront
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