14/30294910 DC : 0
Superseded
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.
BS EN 62047-26 ED1.0 - SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 26: DESCRIPTION AND MEASUREMENT METHODS FOR MICRO TRENCH AND NEEDLE STRUCTURES
Hardcopy , PDF
31-05-2016
English
FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Description of trench structures in a
micrometer scale
5 Description of needle structures in a
micrometer scale
6 Measurement method
Annex A (informative) - Examples of measurement for
trench & needle structures in a micrometer scale
Annex B (informative) - Uncertainty in Dimensional
Measurement
Bibliography
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