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16/30295652 DC : 0

Superseded
Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

BS EN ISO 14644-15 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 15: ASSESSMENT OF SUITABILITY FOR USE OF EQUIPMENT AND MATERIALS BY AIRBORNE CHEMICAL AND SURFACE CHEMICAL CONCENTRATION
Available format(s)

Hardcopy , PDF

Superseded date

31-01-2018

Language(s)

English

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Symbols and abbreviations
5 Test setup
6 Representative mode
7 Visual inspection
8 Test Description
9 Calculation of the measured concentrations
10 Calculation of specific emission rate
11 Assessment
12 Documentation
Annex A (informative) - Example calculation for
        suitability assessment of one equipment
        (existing installation)
Annex B (informative) - Example calculation for
        suitability assessment of wall material (existing
        cleanroom/clean zone installation)
Annex C (informative) - Suitability assessment of a
        combination of equipment and floor material
        in a cleanroom to be designed
Bibliography

BS EN ISO 14644-15.

Committee
LBI/30
DocumentType
Draft
Pages
30
PublisherName
British Standards Institution
Status
Superseded

IEST RP CC002 : 1998 RECOMMENDED PRACTICE FOR LAMINAR FLOW CLEAN AIR DEVICES
SAE AIR1167:1970 ENVIRONMENTAL CRITERIA AND TESTS FOR AEROSPACE GROUND EQUIPMENT IN SUPPORT OF SPACE SYSTEMS
ISO 14644-8:2013 Cleanrooms and associated controlled environments Part 8: Classification of air cleanliness by chemical concentration (ACC)
SEMI E49 : 2017 GUIDE FOR HIGH PURITY AND ULTRAHIGH PURITY PIPING PERFORMANCE, SUBASSEMBLIES, AND FINAL ASSEMBLIES
IEST RP CC026.2 : 2004 CLEANROOM OPERATIONS
ISO 8573-8:2004 Compressed air — Part 8: Test methods for solid particle content by mass concentration
SEMI F70 : 2011(R2017) TEST METHOD FOR DETERMINATION OF PARTICLE CONTRIBUTION OF GAS DELIVERY SYSTEM
ISO 2889:2010 Sampling airborne radioactive materials from the stacks and ducts of nuclear facilities
IEST RP CC013 : 86-T EQUIPMENT CALIBRATION OR VALIDATION PROCEDURES
ISO 16000-9:2006 Indoor air — Part 9: Determination of the emission of volatile organic compounds from building products and furnishing — Emission test chamber method
ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
SEMI F28 : 2003(R2015) TEST METHOD FOR MEASURING PARTICLE GENERATION FROM PROCESS PANELS
IEST RP CC028.1 : 2002

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