BS ISO 14644-12 - CLEANROOMS AND ASSOCIATED CONTROLLED ENVIRONMENTS - PART 12: SPECIFICATIONS FOR MONITORING AIR CLEANLINESS BY NANOSCALE PARTICLE CONCENTRATION

Available format(s)

Hardcopy , PDF

Language(s)

English

Publisher

British Standards Institution

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
4 Monitoring
5 Test report
Annex A (normative) - Reference method for
monitoring by condensation particle counting
Annex B (informative) - Particle counting efficiency
and particle size cutoff
Bibliography

BS ISO 14644-12.

Committee	LBI/30
DocumentType	Draft
Pages	21
PublisherName	British Standards Institution
Status	NA

ISO 14644-3:2005	Cleanrooms and associated controlled environments Part 3: Test methods
ISO 14644-1:2015	Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
ISO/TS 80004-1:2015	Nanotechnologies — Vocabulary — Part 1: Core terms
IEST G CC1002 : 1999	DETERMINATION OF THE CONCENTRATION OF AIRBORNE ULTRAFINE PARTICLES
ISO 21501-4:2007	Determination of particle size distribution Single particle light interaction methods Part 4: Light scattering airborne particle counter for clean spaces
ISO 27891:2015	Aerosol particle number concentration — Calibration of condensation particle counters
ISO 15900:2009	Determination of particle size distribution Differential electrical mobility analysis for aerosol particles
ISO/TS 80004-2:2015	Nanotechnologies — Vocabulary — Part 2: Nano-objects