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ASTM D 5127 : 2012

Superseded
Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by
superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

Standard Guide for Ultra-Pure Water Used in the Electronics and Semiconductor Industries
Available format(s)

Hardcopy , PDF

Superseded date

11-11-2014

Language(s)

English

Published date

15-06-2012

1.1 This guide provides recommendations for water quality related to electronics and semiconductor-industry manufacturing. Seven classifications of water are described, including water for line widths as low as 0.032 micron. In all cases, the recommendations are for water at the point of distribution (POD).

1.2 Water is used for washing and rinsing of semiconductor components during manufacture. Water is also used for cleaning and etching operations, making steam for oxidation of silicon surfaces, preparing photomasks, and depositing luminescent materials. Other applications are in the development and fabrication of solid-state devices, thin-film devices, communication lasers, light-emitting diodes, photo-detectors, printed circuits, memory devices, vacuum-tube devices, or electrolytic devices.

1.3 Users needing water qualities different from those described here should consult other water standards, such as Specification D1193 and Guide D5196.

1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Committee
D 19
DocumentType
Guide
Pages
6
PublisherName
American Society for Testing and Materials
Status
Superseded
SupersededBy
Supersedes

ASTM D 7980 : 2015 Standard Guide for Ion-Chromatographic Analysis of Anions in Grab Samples of Ultrapure Water (UPW) in the Semiconductor Industry
ASTM D 5544 : 2016 Standard Test Method for On-Line Measurement of Residue After Evaporation of High-Purity Water
ASTM D 5196 : 2006 : R2018 Standard Guide for Bio-Applications Grade Water

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£62.61
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