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  • ASTM E 1217 : 2011 : REDLINE

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    Standard Practice for Determination of the Specimen Area Contributing to the Detected Signal in Auger Electron Spectrometers and Some X-Ray Photoelectron Spectrometers

    Available format(s):  PDF

    Language(s):  English

    Published date:  01-11-2011

    Publisher:  American Society for Testing and Materials

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    CONTAINED IN VOL. 03.06, 2015 Defines methods for determining the specimen area contributing to the detected signal in Auger electron spectrometers and some types of X-ray photoelectron spectrometers (spectrometer analysis area) when this area is defined by the electron collection lens and aperture system of the electron energy analyzer.

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    1.1 This practice describes methods for determining the specimen area contributing to the detected signal in Auger electron spectrometers and some types of X-ray photoelectron spectrometers (spectrometer analysis area) when this area is defined by the electron collection lens and aperture system of the electron energy analyzer. The practice is applicable only to those X-ray photoelectron spectrometers in which the specimen area excited by the incident X-ray beam is larger than the specimen area viewed by the analyzer, in which the photoelectrons travel in a field-free region from the specimen to the analyzer entrance. Some of the methods described here require an auxiliary electron gun mounted to produce an electron beam of variable energy on the specimen (electron-gun method). Other experiments require a sample with a sharp edge, such as a wafer covered with a uniform clean layer (for example, gold (Au) or silver (Ag)) and cleaved to obtain a long side (sharp-edge method).

    1.2 This practice is recommended as a useful means for determining the specimen area viewed by the analyzer for different conditions of spectrometer operation, for verifying adequate specimen and beam alignment, and for characterizing the imaging properties of the electron energy analyzer.

    1.3 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

    1.4 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

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    Committee E 42
    Document Type Redline
    Publisher American Society for Testing and Materials
    Status Current

    Standards Referenced By This Book - (Show below) - (Hide below)

    ISO/TR 19319:2013 Surface chemical analysis Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
    ASTM E 1016 : 2007 : R2012 : EDT 1 Standard Guide for Literature Describing Properties of Electrostatic Electron Spectrometers
    PD ISO/TR 18196:2016 Nanotechnologies. Measurement technique matrix for the characterization of nano-objects
    ASTM E 2735 : 2014 : REDLINE Standard Guide for Selection of Calibrations Needed for X-ray Photoelectron Spectroscopy (XPS) Experiments
    PD ISO/TR 19319:2013 SURFACE CHEMICAL ANALYSIS - FUNDAMENTAL APPROACHES TO DETERMINATION OF LATERAL RESOLUTION IN BEAM-BASED METHODS
    ISO/TR 18196:2016 Nanotechnologies — Measurement technique matrix for the characterization of nano-objects
    ASTM E 1016 : 2007 Standard Guide for Literature Describing Properties of Electrostatic Electron Spectrometers

    Standards Referencing This Book - (Show below) - (Hide below)

    ASTM E 673 : 2003 Standard Terminology Relating to Surface Analysis (Withdrawn 2012)
    ISO 18115:2001 Surface chemical analysis Vocabulary
    ISO 18516:2006 Surface chemical analysis Auger electron spectroscopy and X-ray photoelectron spectroscopy Determination of lateral resolution
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