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ASTM E 1634 : 2011

Superseded
Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

View Superseded by
superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

Standard Guide for Performing Sputter Crater Depth Measurements
Available format(s)

Hardcopy , PDF

Superseded date

15-11-2019

Language(s)

English

Published date

01-11-2011

1.1 This guide covers the preferred procedure for acquiring and post-processing of sputter crater depth measurements. This guide is limited to stylus-type surface profilometers equipped with a stage, stylus, associated scan and sensing electronics, video system for sample and scan alignment, and computerized system.

1.2 The values stated in SI units are to be regarded as standard. No other units of measurement are included in this standard.

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

Committee
E 42
DocumentType
Guide
Pages
3
PublisherName
American Society for Testing and Materials
Status
Superseded
SupersededBy
Supersedes

ASTM E 2735 : 2014 Standard Guide for Selection of Calibrations Needed for X-ray Photoelectron Spectroscopy (XPS) Experiments
ASTM E 1127 : 2008 : R2015 Standard Guide for Depth Profiling in Auger Electron Spectroscopy

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£55.10
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