Standard Test Method for Sizing and Counting Airborne Particulate Contamination in Cleanrooms and Other Dust-Controlled Areas

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

27-04-2021

Publisher

American Society for Testing and Materials

1.1This test method covers counting and sizing airborne particulate matter 5 µm and larger (macroparticles). The sampling areas are specifically those with contamination levels typical of cleanrooms and dust-controlled areas.

1.2Units—The values stated in either SI units or inch-pound units are to be regarded separately as standard. The values stated in each system are not necessarily exact equivalents; therefore, to ensure conformance with the standard, each system shall be used independently of the other, and values from the two systems shall not be combined.

1.3This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.

1.4This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.

Committee	E 21
DocumentType	Test Method
Pages	8
PublisherName	American Society for Testing and Materials
Status	Current
Supersedes	ASTM F 25/F25M : 2009 : R2015

ASTM F 51/F51M : 2020	Standard Test Method for Sizing and Counting Particulate Contaminant In and On Clean Room Garments
MIL-DTL-197 Revision N:2022	Packaging of Bearings, Associated Parts and Subassemblies