ASTM F 388 : 1984
Withdrawn
Withdrawn
A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.
Method for Measurement of Oxide Thickness on Silicon Wafers and Metallization Thickness by Multiple-Beam Interference (Tolansky Method) (Withdrawn 1993)
Withdrawn date
31-12-1993
Published date
31-12-2010
CONTAINED IN VOL 10.05 1995 Gives destructive method to measure thickness of uniform layer formed or deposited upon a flat surface. For layers 4 to 3000nm thick.
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