1.1This practice covers the determination of the particle concentration, by number, and the size distribution of airborne particles in dust-controlled areas and clean rooms, for particles in the size range of approximately 0.01 to 5.0 μm. Particle concentrations not exceeding 3.5 × 10⁶ particles/m ³ (100 000/ft³) are covered for all particles equal to and larger than the minimum size measured.

1.2This practice uses an airborne single particle counting device (SPC) whose operation is based on measuring the signal produced by an individual particle passing through the sensing zone. The signal must be directly or indirectly related to particle size.

1.3Individuals performing tests in accordance with this practice shall be trained in use of the SPC and shall understand its operation.

1.4Since the concentration and the particle size distribution of airborne particles are subject to continuous variations, the choice of sampling probe configuration, locations, and sampling times will affect sampling results. Further, the differences in the physical measurement, electronic, and sample handling systems between the various SPCs and the differences in physical properties of the various particles being measured can contribute to variations in the test results. These differences should be recognized and minimized by using a standard method of primary calibration and by minimizing variability of sample acquisition procedures.

1.5Sample acquisition procedures and equipment may be selected for specific applications based on varying cleanroom class levels. Firm requirements for these selections are beyond the scope of this practice; however, sampling practices shall be stated that take into account potential spatial and statistical variations of suspended particles in clean rooms.

1.6Units—The values stated in SI units are to be regarded as standard. The values given in parentheses after SI units are provided for information only and are not considered standard.

1.7This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. For specific hazards statements, see Section 8.

1.8This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.