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ASTM
ASTM F 613 : 1993

ASTM F 613 : 1993

Withdrawn

Withdrawn

A Withdrawn Standard is one, which is removed from sale, and its unique number can no longer be used. The Standard can be withdrawn and not replaced, or it can be withdrawn and replaced by a Standard with a different number.

Test Method for Measuring Diameter of Semiconductor Wafers (Withdrawn 2001)

Available format(s)

Hardcopy , PDF

Withdrawn date

10-06-2001

Language(s)

English

Published date

31-12-2010

Publisher

American Society for Testing and Materials

CONTAINED IN VOL 10.05 , 2000 For measuring silicon slices and wafers up to 205 mm in diameter and other circular semiconductor materials.

1.1 This test method covers measurement of the diameter of silicon wafers up to 205 mm in diameter. Other semiconductor materials with a circular shape can also be measured.

1.2 This test method is independent of surface finish and may be performed on edge-contoured specimens.

1.3 This test method is to be carried out at a temperature of 23 + 5°C.

1.4 This test method was developed for use with silicon wafers with standard diameters as given in SEMI Specifications M1, and may be used for wafers of other diameter or materials within the specified limit, provided suitable gage blocks are available and standard flat configurations are used.

1.5 This test method is intended for use as a referee method.

1.6 Roundness is not measured by this method.

1.7 This standard does not purport to address all of the safety problems, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.

1.8 For wafers of diameter 3 in. or smaller, the values stated in inch-pound units are to be regarded as standard; the values stated in acceptable metric units in parentheses are for information only. For wafers of diameter larger than 3 in., the values stated in acceptable metric units are to be regarded as standard whether or not they appear with parentheses; inch-pound units are for information only.

Committee
F 01
DocumentType
Test Method
Pages
5
PublisherName
American Society for Testing and Materials
Status
Withdrawn

MIL-STD-989 Base Document:1991 CERTIFICATION REQUIREMENTS FOR JAN SEMICONDUCTOR DEVICES
ASTM F 522 : 1994 Test Method for Stacking Fault Density of Epitaxial Layers of Silicon by Interference-Contrast Microscopy (Withdrawn 1998)
ASTM F 43 : 1999 Standard Test Methods for Resistivity of Semiconductor Materials (Withdrawn 2003)

ASTM E 1 : 2014 : REDLINE Standard Specification for ASTM Liquid-in-Glass Thermometers
GGG-G-15 Revision C:1975 GAGE BLOCKS AND ACCESSORIES (INCH AND METRIC)

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PDF - English
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