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BS EN 62047-1:2016

Current
Current

The latest, up-to-date edition.

Semiconductor devices. Micro-electromechanical devices Terms and definitions
Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

30-04-2016

IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition:
a) removal of ten terms;
b) revision of twelve terms;
c) addition of sixteen new terms.

Committee
EPL/47
DevelopmentNote
Supersedes 03/107914 DC. (09/2006) Supersedes 13/30293217 DC. (04/2016)
DocumentType
Standard
Pages
38
PublisherName
British Standards Institution
Status
Current
Supersedes

Standards Relationship
I.S. EN 62047-1:2016 Identical
NF EN 62047-1 : 2016 Identical
SN EN 62047-1:2016 Identical
DIN EN 62047-1:2014-05 (Draft) Identical
EN 62047-1:2016 Identical
NBN EN 62047-1 : 2016 Identical
IEC 62047-1:2016 Identical
IEC 61988-2-3:2009 Identical
EN 61988-2-3:2009 Identical

IEC 60050-815:2015 International Electrotechnical Vocabulary (IEV) - Part 815: Superconductivity
ISO 2041:2009 Mechanical vibration, shock and condition monitoring Vocabulary
IEC 62047-1:2016 Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
IEC 60050-521:2002 International Electrotechnical Vocabulary (IEV) - Part 521: Semiconductor devices and integrated circuits

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