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BS EN 62047-6:2010

Current
Current

The latest, up-to-date edition.

Semiconductor devices. Micro-electromechanical devices Axial fatigue testing methods of thin film materials
Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

30-04-2010

Publisher

British Standards Institution

1 Scope
2 Normative references
3 Terms and definitions
4 Test piece
5 Testing method and test apparatus
6 Endurances (test termination)
7 Test report
Annex A (informative) - Technical background of this
        standard
Annex B (informative) - Test piece
Annex C (informative) - Displacement measurement
Annex D (informative) - Testing environment
Annex E (informative) - Number of test pieces
Bibliography
Annex ZA (normative) - Normative references to international
         publications with their corresponding European
         publications

Describes the method for axial tensile-tensile force fatigue testing of thin film materials with a length and width under 1 mm and a thickness in the range between 0,1 [mu]m and 10 [mu]m under constant force range or constant displacement range.

This International Standard specifies the method for axial tensile–tensile force fatigue testing of thin film materials with a length and width under 1 mm and a thickness in the range between 0,1 μm and 10 μm under constant force range or constant displacement range. Thin films are used as main structural materials for MEMS and micromachines.

The main structural materials for MEMS, micromachines, etc., have special features, such as typical dimensions of a few microns, material fabrication by deposition, and test piece fabrication by means of non-mechanical machining, including photolithography. This International Standard specifies the axial force fatigue testing methods for micro-sized smooth specimens, which enables a guarantee of accuracy corresponding to the special features. The tests are carried out at room temperatures, in air, with loading applied to the test piece along the longitudinal axis.

Committee
EPL/47
DevelopmentNote
Supersedes 07/30163302 DC. (04/2010)
DocumentType
Standard
Pages
20
PublisherName
British Standards Institution
Status
Current
Supersedes

Standards Relationship
EN 62047-6:2010 Identical
IEC 62047-6:2009 Identical

ASTM E 466 : 2015 : REDLINE Standard Practice for Conducting Force Controlled Constant Amplitude Axial Fatigue Tests of Metallic Materials
ISO 6892:1998 Metallic materials Tensile testing at ambient temperature
IEC 62047-2:2006 Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials
EN 62047-2:2006 Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials
ISO 1099:2017 Metallic materials — Fatigue testing — Axial force-controlled method
ISO 12107:2012 Metallic materials — Fatigue testing — Statistical planning and analysis of data

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Hardcopy - English
PDF - English
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