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BS EN ISO 14644-3:2005

Superseded
Superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

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superseded

A superseded Standard is one, which is fully replaced by another Standard, which is a new edition of the same Standard.

Cleanrooms and associated controlled environments Test methods
Available format(s)

Hardcopy , PDF

Superseded date

19-06-2020

Language(s)

English

Published date

20-12-2005

Foreword
Introduction
1 Scope
2 Normative references
3 Terms and definitions
  3.1 General
  3.2 Airborne particle measurement
  3.3 Air filters and systems
  3.4 Airflow and other physical states
  3.5 Electrostatic measurement
  3.6 Measuring apparatus and measuring conditions
  3.7 Occupancy states
4 Test procedures
  4.1 Cleanroom tests
  4.2 Principle
5 Test reports
Annex A (informative) Choice of recommended tests of
        an installation and the sequence in which to
        carry them out
Annex B (informative) Test methods
Annex C (informative) Test apparatus
Bibliography

Describes test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones.

Committee
LBI/30
DocumentType
Standard
Pages
76
PublisherName
British Standards Institution
Status
Superseded
SupersededBy

12/30240811 DC : 0 BS 8568 - CLEANROOM ENERGY - CODE OF PRACTICE FOR IMPROVING ENERGY EFFICIENCY IN CLEANROOMS AND CLEAN AIR DEVICES
PD 6609:2007 Environmental cleanliness in enclosed spaces. Guide to in situ high efficiency filter leak testing
BS 8568:2013 Cleanroom energy. Code of practice for improving energy efficiency in cleanrooms and clean air devices

ISO 5167-3:2003 Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full Part 3: Nozzles and Venturi nozzles
IEST RP CC007.1 : 1992 TESTING ULPA FILTERS
ASTM F 328 : 1998 Standard Practice for Calibration of an Airborne Particle Counter Using Monodisperse Spherical Particles
ISO 14644-2:2015 Cleanrooms and associated controlled environments Part 2: Monitoring to provide evidence of cleanroom performance related to air cleanliness by particle concentration
EN 12599:2012 Ventilation for buildings - Test procedures and measurement methods to hand over air conditioning and ventilation systems
ISO 7726:1998 Ergonomics of the thermal environment Instruments for measuring physical quantities
ISO 5167-4:2003 Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full Part 4: Venturi tubes
SEMI E14 : 1993 MEASUREMENT OF PARTICLE CONTAMINATION CONTRIBUTED TO THE PRODUCT FROM THE PROCESS OR SUPPORT TOOL
EN 1822-2:2009 High efficiency air filters (EPA, HEPA and ULPA) - Part 2: Aerosol production, measuring equipment, particle counting statistics
VDI 2083 Blatt 4:1996-02 Cleanroom technology - Surface cleanliness
ISO 5167-2:2003 Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full Part 2: Orifice plates
IEST RP CC021.1 : 1992 TESTING HEPA AND ULPA FILTER MEDIA
IEST G CC1001 : 1999 COUNTING AIRBORNE PARTICLES FOR CLASSIFICATION AND MONITORING OF CLEANROOMS AND CLEAN ZONES
ISO 5167-1:2003 Measurement of fluid flow by means of pressure differential devices inserted in circular cross-section conduits running full Part 1: General principles and requirements
ISO 14644-1:2015 Cleanrooms and associated controlled environments Part 1: Classification of air cleanliness by particle concentration
ISO 14644-4:2001 Cleanrooms and associated controlled environments — Part 4: Design, construction and start-up
IEST RP CC001.3 : 1993 HEPA AND ULPA FILTERS
EN 1822-4:2009 High efficiency air filters (EPA, HEPA and ULPA) - Part 4: Determining leakage of filter elements (scan method)

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£298.00
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