BS EN ISO 25178-604:2013
Current
The latest, up-to-date edition.
Hardcopy , PDF
English
31-08-2013
Foreword
Introduction
1 Scope
2 Terms and definitions
3 Descriptions of the influence quantities
Annex A (informative) - Overview and components
of a coherence scanning interferometry
(CSI) microscope
Annex B (informative) - Coherence scanning interferometry
(CSI) theory of operation
Annex C (informative) - Spatial resolution
Annex D (informative) - Example procedure for estimating
surface topography repeatability
Annex E (informative) - Relation to the GPS matrix model
Bibliography
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