BS ISO 22493:2014
Current
The latest, up-to-date edition.
Hardcopy , PDF
English
30-04-2014
Foreword
Introduction
1 Scope
2 Abbreviated terms
3 Terms and definitions used in the physical
basis of SEM
4 Terms and definitions used in SEM instrumentation
5 Terms and definitions used in SEM image
formation and processing
6 Terms and definitions used in SEM image
interpretation and analysis
7 Terms and definitions used in the measurement
and calibration of SEM image
magnification and resolution
Bibliography
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