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BS ISO 22493:2014

Current
Current

The latest, up-to-date edition.

Microbeam analysis. Scanning electron microscopy. Vocabulary
Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

30-04-2014

Foreword
Introduction
1 Scope
2 Abbreviated terms
3 Terms and definitions used in the physical
  basis of SEM
4 Terms and definitions used in SEM instrumentation
5 Terms and definitions used in SEM image
  formation and processing
6 Terms and definitions used in SEM image
  interpretation and analysis
7 Terms and definitions used in the measurement
  and calibration of SEM image
  magnification and resolution
Bibliography

Describes terms used in the practice of scanning electron microscopy (SEM).

This International Standard defines terms used in the practice of scanning electron microscopy (SEM). It covers both general and specific concepts, classified according to their hierarchy in a systematic order, with those terms that have already been defined in ISO23833 also included, where appropriate.

This International Standard is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of this International Standard are applicable to documents relevant to related fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.

Committee
CII/9
DevelopmentNote
Supersedes 06/30128226 DC. (10/2008)
DocumentType
Standard
Pages
32
PublisherName
British Standards Institution
Status
Current
Supersedes

Standards Relationship
ISO 22493:2014 Identical

ISO 10241:1992 International terminology standards Preparation and layout
ISO 1087-1:2000 Terminology work Vocabulary Part 1: Theory and application
ISO 18115-1:2013 Surface chemical analysis — Vocabulary — Part 1: General terms and terms used in spectroscopy
ISO 23833:2013 Microbeam analysis — Electron probe microanalysis (EPMA) — Vocabulary
ISO 704:2009 Terminology work — Principles and methods

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