CEI EN 62047-11 : 2014
Current
The latest, up-to-date edition.
SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 11: TEST METHOD FOR COEFFICIENTS OF LINEAR THERMAL EXPANSION OF FREE-STANDING MATERIALS FOR MICRO-ELECTROMECHANICAL SYSTEMS
Hardcopy , PDF
English
01-01-2014
FOREWORD
1 Scope
2 Normative References
3 Symbols and designations
4 Test piece
5 Testing method and test apparatus
6 Test report
Annex A (informative) - Test piece fabrication
Annex B (informative) - Test piece handling example
Annex C (informative) - Test piece releasing process
Annex D (informative) - Out-of-plane test setup and
test piece example
Annex E (informative) - Data analysis example in
in-plane test method
Annex F (informative) - Data analysis example in
out-of-plane test method
Bibliography
Annex ZA (normative) - Normative references to
international publications with their
corresponding European publications
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