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DIN EN ISO 10692-1:2003-04

Current
Current

The latest, up-to-date edition.

GAS CYLINDERS - GAS CYLINDER VALVE CONNECTIONS FOR USE IN THE MICROELECTRONIC INDUSTRY - PART 1: OUTLET CONNECTIONS
Available format(s)

Hardcopy , PDF

Language(s)

English, German

Published date

01-01-2003

Foreword
1 Scope
2 Normative references
3 General requirements
4 General design
5 Dimensions
6 630 and 640 series connections
7 710 and 720 series connections
8 Components common to both series
9 Thread profile
10 Allocation of outlet to single gases listed in annex A
11 Allocation of other gases and of gas mixtures to outlets
Annex A (normative) Mandatory outlet allocations for
                      selected single gases
Annex B (informative) Examples showing how to use the
                      information given in clauses 10
                      and 11
Bibliography
Annex ZA (normative) Normative references to international
                      publications with their relevant
                      European publications

Applicable to the outlet connections of gas cylinder valves for gases and gas mixtures and concerns special requirements where the highest levels of cleanliness and freedom from particles are demanded for the manufacture of microelectronic components or similar applications.

DocumentType
Standard
Pages
21
PublisherName
German Institute for Standardisation (Deutsches Institut für Normung)
Status
Current

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