EN 62047-26:2016
Current
The latest, up-to-date edition.
Semiconductor devices - Micro-electromechanical devices - Part 26: Description and measurement methods for micro trench and needle structures
22-04-2016
FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Description of trench structures in a micrometer scale
5 Description of needle structures in a micrometer scale
6 Measurement method
Annex A (informative) - Examples of measurement for
trench and needle structures in a micrometer scale
Annex B (informative) - Uncertainty in dimensional measurement
Bibliography
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