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SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 5: RF MEMS SWITCHES

Available format(s)

Hardcopy , PDF

Language(s)

English

Published date

01-01-2011

Publisher

National Standards Authority of Ireland

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For Harmonized Standards, check the EU site to confirm that the Standard is cited in the Official Journal.

Only cited Standards give presumption of conformance to New Approach Directives/Regulations.

FOREWORD
1 Scope
2 Normative references
3 Terms and definitions
4 Essential ratings and characteristics
5 Measuring methods
6 Reliability (performance)
Annex A (informative) - General description of RF MEMS
        Switches
Annex B (informative) - Geometry of RF MEMS switches
Annex C (informative) - Packaging of RF MEMS switches
Annex D (informative) - Failure mechanism of RF MEMS switches
Annex E (informative) - Applications of RF MEMS switches
Annex F (informative) - Measurement procedure of RF MEMS
        switches
Annex ZA (normative) - Normative references to international
         publications with their corresponding European
         publications

Specifies terminology, definition, symbols, test methods that can be used to evaluate and determine the essential ratings and characteristic parameters of RF MEMS switches.

DevelopmentNote	For CENELEC adoptions of IEC publications, please check www.iec.ch to be sure that you have any corrigenda that may apply. (01/2017)
DocumentType	Standard
Pages	40
PublisherName	National Standards Authority of Ireland
Status	Current

Standards	Relationship
IEC 62047-5:2011	Identical
EN 62047-5:2011	Identical

IEC 60749-5:2017	Semiconductor devices - Mechanical and climatic test methods - Part 5: Steady-state temperature humidity bias life test
IEC 60749-27:2006+AMD1:2012 CSV	Semiconductor devices - Mechanical and climatic test methods - Part27: Electrostatic discharge (ESD) sensitivity testing - Machine model (MM)
IEC 60747-16-4:2004+AMD1:2009+AMD2:2017 CSV	Semiconductor devices - Part 16-4: Microwave integrated circuits - Switches
EN 60749-5:2017	Semiconductor devices - Mechanical and climatic test methods - Part 5: Steady-state temperature humidity bias life test
EN 60749-27:2006/A1:2012	SEMICONDUCTOR DEVICES - MECHANICAL AND CLIMATIC TEST METHODS - PART 27: ELECTROSTATIC DISCHARGE (ESD) SENSITIVITY TESTING - MACHINE MODEL (MM)
EN 60749-10:2002	Semiconductor devices - Mechanical and climatic test methods - Part 10: Mechanical shock
IEC 60747-1:2006+AMD1:2010 CSV	Semiconductor devices - Part 1: General
EN 60747-16-1:2002/A2:2017	SEMICONDUCTOR DEVICES - PART 16-1: MICROWAVE INTEGRATED CIRCUITS - AMPLIFIERS (IEC 60747-16-1:2001/A2:2017)
IEC 60747-16-1:2001+AMD1:2007+AMD2:2017 CSV	Semiconductor devices - Part 16-1: Microwave integrated circuits - Amplifiers
IEC 60749-10:2002	Semiconductor devices - Mechanical and climatic test methods - Part 10: Mechanical shock
IEC 60749-12:2002	Semiconductor devices - Mechanical and climatic test methods - Part 12: Vibration, variable frequency
EN 60749-12:2002	Semiconductor devices - Mechanical and climatic test methods - Part 12: Vibration, variable frequency

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I.S. EN 62047-5:2011

SEMICONDUCTOR DEVICES - MICRO-ELECTROMECHANICAL DEVICES - PART 5: RF MEMS SWITCHES

Table of Contents

Abstract

General Product Information

International Equivalents

Standards Referencing This Book

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